JPH0745081Y2 - ペリクル構造体 - Google Patents
ペリクル構造体Info
- Publication number
- JPH0745081Y2 JPH0745081Y2 JP1990061661U JP6166190U JPH0745081Y2 JP H0745081 Y2 JPH0745081 Y2 JP H0745081Y2 JP 1990061661 U JP1990061661 U JP 1990061661U JP 6166190 U JP6166190 U JP 6166190U JP H0745081 Y2 JPH0745081 Y2 JP H0745081Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- adhesive layer
- release liner
- peeling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012790 adhesive layer Substances 0.000 claims description 21
- 239000010410 layer Substances 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 210000005069 ears Anatomy 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990061661U JPH0745081Y2 (ja) | 1990-06-11 | 1990-06-11 | ペリクル構造体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990061661U JPH0745081Y2 (ja) | 1990-06-11 | 1990-06-11 | ペリクル構造体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0420049U JPH0420049U (en]) | 1992-02-19 |
| JPH0745081Y2 true JPH0745081Y2 (ja) | 1995-10-11 |
Family
ID=31590112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990061661U Expired - Lifetime JPH0745081Y2 (ja) | 1990-06-11 | 1990-06-11 | ペリクル構造体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745081Y2 (en]) |
-
1990
- 1990-06-11 JP JP1990061661U patent/JPH0745081Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0420049U (en]) | 1992-02-19 |
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